Viscous Thermal Flow Model

Developed by H. Liao under the direction of Timothy S. Cale

The flow submodel simulates thin film thermal flow and planarization process. The equations that govern the thin film flow are a set of partial differential equations which describe the momentum and mass balances along with appropriate boundary conditions. Basic Assumptions for the flow model are:

• the deposited film is isothermal;
• the physical properties of the film are not a function of position (isotropic);
• the melted film is incompressible, and Newtonian
• the flow is laminar

This figure illustrates the coordinate system and characteristic length scales used in the viscous flow model